کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9817515 1518767 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Characterisation of an indirectly heated cathode source using Langmuir probe diagnostics
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Characterisation of an indirectly heated cathode source using Langmuir probe diagnostics
چکیده انگلیسی
The relationships between the electron temperature and arc control parameters were investigated for argon and BF3. The spatial distributions of electrons and ions were also studied using probes located in different positions in the arc. For the two species studied, the electron temperatures for similar arc conditions were found to be different and the nature of the dependence of this temperature on operating conditions was also found to be different.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 240, Issues 1–2, October 2005, Pages 13-17
نویسندگان
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