Application of ion beam analysis to the characterization of protective coatings prepared by plasma detonation techniques on steel samples

Ion beam analysis was used in order to characterize Al2O3 layers deposited on stainless steel by plasma detonation techniques and Al2O3/Cr/TiN composite protective coatings. The aluminum depth distribution was determined using the 991 keV resonance of the 27Al(p, γ)28Si reaction, whereas the 14N(d, α)12C reaction was utilized for the nitrogen profiling. The determination of the titanium depth distribution was performed by Rutherford backscattering spectrometry (RBS). The ratio of Al:O and Ti:N in the investigated Al2O3 and TiN layers was found to be close to the stoichiometric one. The effect of an additional high current electron beam (HCEB) treatment on the composition of the coatings was also investigated. Titanium and nitrogen diffusion from the surface to the interior was observed in the case of the coatings treated by HCEB.