An ECR ion source directly excited in a selected microwave mode cavity resonator for material processing

An ion source in form of the cavity resonator is designed and constructed on the basis of the above results. As a preliminary experiment, the ECR plasma is generated in a race-track magnetic field formed by permanent magnets. It is found that ion saturation current density increases stepwise as the metal plate is moved. This increase is considered to be caused by enhancing the intensity of electric field at the ECR zone in the resonator.