کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9817758 | 1518771 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
An ECR ion source directly excited in a selected microwave mode cavity resonator for material processing
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
An ion source in form of the cavity resonator is designed and constructed on the basis of the above results. As a preliminary experiment, the ECR plasma is generated in a race-track magnetic field formed by permanent magnets. It is found that ion saturation current density increases stepwise as the metal plate is moved. This increase is considered to be caused by enhancing the intensity of electric field at the ECR zone in the resonator.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 237, Issues 1â2, August 2005, Pages 262-266
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 237, Issues 1â2, August 2005, Pages 262-266
نویسندگان
Toyohisa Asaji, Hiroshi Sasaki, Hideyuki Furuki, Yushi Kato, Shigeyuki Ishii, Motoichi Kanazawa, Junji Saito,