کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9817760 | 1518771 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Mass and energy analysis of the ions in a plasma flood system
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
In this study, a plasma analyser comprising a double hemi-spherical electrostatic energy analyser and a quadrupole mass spectrometer, was used to measure the energy distributions of all the ion species leaving a magnetically confined argon plasma, generated in the discharge chamber of a conventional flood neutraliser. The energy distributions extended to surprisingly high energies and the peak structures depended strongly on discharge voltage, discharge current and gas pressure. The nature of these dependencies was complex with both the pressure and arc current affecting the way in which the ion energy distributions depended on arc voltage. In all cases, multiply charged ions played a significant role in determining the nature of the ion energy distributions.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 237, Issues 1â2, August 2005, Pages 273-277
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 237, Issues 1â2, August 2005, Pages 273-277
نویسندگان
A.C. Wooding, D.G. Armour, J.A. van den Berg, A.J.T. Holmes, C. Burgess, R.D. Goldberg,