کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9817760 1518771 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Mass and energy analysis of the ions in a plasma flood system
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Mass and energy analysis of the ions in a plasma flood system
چکیده انگلیسی
In this study, a plasma analyser comprising a double hemi-spherical electrostatic energy analyser and a quadrupole mass spectrometer, was used to measure the energy distributions of all the ion species leaving a magnetically confined argon plasma, generated in the discharge chamber of a conventional flood neutraliser. The energy distributions extended to surprisingly high energies and the peak structures depended strongly on discharge voltage, discharge current and gas pressure. The nature of these dependencies was complex with both the pressure and arc current affecting the way in which the ion energy distributions depended on arc voltage. In all cases, multiply charged ions played a significant role in determining the nature of the ion energy distributions.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 237, Issues 1–2, August 2005, Pages 273-277
نویسندگان
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