Energy- and angular-distributions of F+ ions emitted from a F-terminated Si(1Â 0Â 0) surface with slow highly charged ions

Time and two-dimensional position distributions of F+ ions emitted from a well-defined F/Si(1 0 0)-2 × 1 target were measured for impact of slow highly charged ions of 3.9 keV Ar5+. The time and position distributions were transformed into energy and angular distributions, which revealed that the peak emission energy was 2.0 ± 0.6 eV and the emission angle measured from the surface normal was 18 ± 4° in the (0 1 1) or (011¯) plane.