Reflection of nitrogen ions from copper surface: Experiment and calculations

The angular and energy distributions of nitrogen ions reflected from the Cu-surface are measured at the incident energy 300 keV. A theoretical model is proposed. A weak dependence of the yield of reflected particles is obtained at large scattering angles. This effect allows the normalization of experimental and theoretical data and the determination of the reflection coefficients. The calculation results for grazing angles 2° and 4° are in qualitative agreement with experimental data.