Inelastic interactions of slow ions and atoms with surfaces

Interaction of slow atoms, singly- or multiply charged ions with a solid surface pumps - via nuclear and electronic stopping processes - part of the projectile energy into the target system. In this way ejection of slow electrons and target particles (sputtering) can be initiated. We discuss the relevant stopping processes and their interrelation with the projectile charge. Recently developed coincidence techniques are used for detailed studies of slow particle induced kinetic (KE) and potential electron emission (PE) from the selvage of mono-crystalline metal and insulator surfaces. We also present a model study on target-structure dependent KE from highly-oriented pyrolythic graphite (HOPG), and shortly review slow multicharged ion induced desorption from insulator surfaces (potential sputtering - PS).