Multipurpose 14.5Â GHz ECR ion source: Special features and application for surface modification

Highly charged Xe+q ions (up to q = 27) were produced by a 14.5 GHz electron cyclotron resonance ion source and used for solid surface modification experiments. AFM investigations show that hillock-like defects are created by ions with q = 20 and 24 on the surface of thin Se films as well as on the natural facets of multi-component SbSI crystals.