کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9818126 | 1518776 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Development of low energy neutral atom scattering spectroscopy based on CAICISS operable in gas phase atmosphere
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
Based on coaxial impact-collision ion scattering spectroscopy (CAICISS) operable in a gas phase atmosphere, we have developed a low energy neutral atom scattering spectroscopy, in which a neutral He beam is used as a probe, to avoid the charging effects of insulator surfaces. In this technique, He gas is introduced into a charge exchange cell set in a sample chamber, and under He gas atmosphere He+ ions are neutralized just before impinging on the sample. The conversion efficiency of He+ to He0 was estimated to be about 40%. In order to demonstrate the performance of the technique, we successfully characterized MgO film deposited on fused silica, without the charging effects of insulator surfaces.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 232, Issues 1â4, May 2005, Pages 290-294
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 232, Issues 1â4, May 2005, Pages 290-294
نویسندگان
Shunjiro Fujii, Yusuke Michishita, Nobuhiko Miyamae, Kenjiro Oura, Mitsuhiro Katayama,