On the extraction of neutralisation information from low energy ion scattering spectra

There are two different ways of measuring low energy ion scattering (LEIS), i.e. detection of ions and neutrals by means of time of flight (TOF-LEIS), or detection of ions only by means of an electrostatic analyser (ESA-LEIS). We discuss, how information on charge exchange can be extracted from ESA-LEIS and TOF-LEIS spectra, respectively and which is the level of accuracy that can be expected from these procedures.