Total sputtering yields of solids under MeV-energy Si ion bombardment

Total sputtering yields have been measured for SiO2 and Cu targets bombarded with Si ions at an incident energy between 500 keV and 5.0 MeV using a quartz crystal microbalance technique. In order to measure total yields accurately, we have developed a beam modulation technique to avoid the effect of thermal drift. In the MeV energy range, an ion penetrates through thin SiO2 and Cu targets and is implanted into a quartz crystal. Therefore, the thickness of these layers deposited on quartz crystals was carefully controlled to avoid damage of quartz crystal by incident ions. As a result, total sputtering yields of SiO2 increased with incident Si ion energy, while those of the Cu target decreased. The total yields of the SiO2 target were represented well by a power low of the electronic stopping power.