Secondary neutral and ionized particle measurements under MeV-energy ion bombardment

We have measured both secondary neutral and ionized particles from an InSb target under 3.0 MeV Si ion bombardment. Measurements of both ions and neutrals have not been carried out so far in the MeV-energy range. The mass spectra and axial emission energy distributions of secondary particles were investigated. Secondary ions were measured with a linear- and a reflective-type time-of-flight technique, whereas secondary neutral particles were photo-ionized by a UV pulsed laser (ArF: 193 nm) and measured with a reflective-type time-of-flight technique. Different results were obtained for neutral particles in comparison with ionized particles. The mean energy of neutral Sb atoms was much lower than that of neutral In atoms, whereas the mean energies of secondary In and Sb ions were nearly equal.