An accurate semi-empirical equation for sputtering yields, II: for neon, argon and xenon ions

A new general, predictive semi-empirical equation for the sputtering yields of mono-elemental solids, using 250-10,000 eV ions incident normally on the surface, has been developed. This equation is based on the approach of Matsunami et al. but includes a new atomic density term and avoids their arbitrary Q term. By analysing published experimental data for Ne, Ar and Xe sputtering yields, the accuracy of this approach may be evaluated. The standard deviations of the data for Ne, Ar and Xe are 14%, 9% and 14%, respectively and represent a very significant improvement on the semi-empirical approaches of Matsunami et al. and of Yamamura and Tawara. General predictive relationships are established to allow the approach to be used for any incident ions, however, it is expected that accuracies for low reactivity (inert gas) incident ions with masses in the range from Ne to Xe will be comparable to the above figures but extrapolation to lighter elements than Ne or heavier than Xe, or to reactive primary ions, should be treated with considerable caution.