کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9818363 | 1518779 | 2005 | 11 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Mass-resolved retarding field energy analyzer and its measurement of ion energy distribution in helicon plasma
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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![عکس صفحه اول مقاله: Mass-resolved retarding field energy analyzer and its measurement of ion energy distribution in helicon plasma Mass-resolved retarding field energy analyzer and its measurement of ion energy distribution in helicon plasma](/preview/png/9818363.png)
چکیده انگلیسی
A novel type of plasma analyzer, which combines five-grid ion energy analyzer and a quadrupole mass spectrometer (QMS), has been developed to simultaneously measure the energy distribution and the mass of ions in a helicon plasma. The ions of the plasma were collected and analyzed through an aperture at the center of the sample holder so as to minimize plasma disturbance. The mass/charge ratios (m/e) of the three types of distinguishable ions in an argon plasma, Ar2+, Ar+ and Ar2+, are 20, 40 and 80, respectively. Fixing the mass of Ar ions one at a time, their energy distributions (IED) are measured at rf power of 1000Â W. The results show that the fairly broad energy distributions of different kinds of ions are rather different. Possible mechanisms are tentatively explained.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 229, Issues 3â4, April 2005, Pages 508-518
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 229, Issues 3â4, April 2005, Pages 508-518
نویسندگان
Nan Jiang, Ning Zhao, Hongfei Liu, Tongzhen Fang,