Computer simulation of neutron transmutation doping of isotopically engineered heterostructures

Computer simulation allows to study dopant distribution changes during NTD process and post-irradiation annealing and to determine appropriate annealing regimes. The initial distribution of the radiation defects was obtained by the dynamic Monte Carlo code DYTRIRS_N, while the subsequent annealing stage was simulated by the rate equations (RE) method. Concentrations of intrinsic defects and depth profiles of phosphorus atoms were obtained.