Simulation studies on sputtering in rough surface

The influence of a surface roughness on sputtering is studied using a Monte Carlo simulation code ACAT. In order to estimate this influence in ACAT calculation, the ACAT code is modified. The two-dimensional fractal surface model is applied to the ACAT code and a surface binding energy of a target material is estimated by a many-body tight-binding potential. Simulation results calculated with the modified ACAT are compared with experimental data and the standard planar ACAT on sputtering yields of a Mo surface irradiated with 2 keV D+ ions. The modified ACAT code predicts well experimental data from rough surfaces compared with the standard planar ACAT code.