کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9818433 | 1518780 | 2005 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Simulation studies on sputtering in rough surface
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
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چکیده انگلیسی
The influence of a surface roughness on sputtering is studied using a Monte Carlo simulation code ACAT. In order to estimate this influence in ACAT calculation, the ACAT code is modified. The two-dimensional fractal surface model is applied to the ACAT code and a surface binding energy of a target material is estimated by a many-body tight-binding potential. Simulation results calculated with the modified ACAT are compared with experimental data and the standard planar ACAT on sputtering yields of a Mo surface irradiated with 2Â keV D+ ions. The modified ACAT code predicts well experimental data from rough surfaces compared with the standard planar ACAT code.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 228, Issues 1â4, January 2005, Pages 369-372
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 228, Issues 1â4, January 2005, Pages 369-372
نویسندگان
T. Kenmotsu, Y. Yamamura, T. Muramoto, N. Hirotani,