کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9821515 | 1518985 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Influence of cathode geometry on discharge characteristics of magnetron-type discharge cells
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Discharge characteristics of magnetron cells with different geometry of the central cathode rod are presented. The cathode rod had one of the following cross-section shapes: circular, rectangular, square, star-like or 4-triangular. The discharge characteristics of the cells were measured systematically at different anode voltages between 1 and 8Â kV and pressures between 5Ã10â9 and 1Ã10â6Â mbar. The magnetic field density was constant at 0.13Â T. The experimental results showed that the current at first slowly increased with increasing voltage, reached a maximum at a certain voltage and then decreased with further increase of the anode voltage. The highest currents were observed in the cell with the triangular cathode rod, while the lowest currents were observed in the cell having the cathode rod with the circular cross-section, where the currents were lower by about 50%.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 80, Issues 1â3, 14 October 2005, Pages 253-257
Journal: Vacuum - Volume 80, Issues 1â3, 14 October 2005, Pages 253-257
نویسندگان
Alenka Vesel, Miran MozetiÄ,