کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9821557 1518987 2005 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Surface ripple amplification and attenuation by sputtering with diametrically opposed ion fluxes
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Surface ripple amplification and attenuation by sputtering with diametrically opposed ion fluxes
چکیده انگلیسی
Monodirectional, obliquely incident, ion bombardment fluxes can generate travelling wave or ripple structures on surfaces as a result of competition between sputtering erosion effects and relaxation processes. It is shown that if two independent ion fluxes, incident in diametrically opposite directions, are employed then the resulting surface structure is a static wave with an amplitude which is time modulated and which, periodically, results in a flat surface. This behaviour may be useful in sputter depth profiling applications.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 79, Issues 1–2, 8 July 2005, Pages 106-109
نویسندگان
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