Glow discharge sputtering of two-component cathode target

The measurements of sputtering of mono-element cathodes as well as alloys in glow discharges created in both rare and molecular gases at extremely different gas pressures and discharge current densities are presented. The measured efficiency of sputtering of all cathodes by neon plasma is higher than that for nitrogen plasma. The sputtering of brass cathode is more extensive than that of mono-cathode (Cu and Zn). The experimental data are compared with the results obtained from computer simulation and discussed. It has been conclude that the back-deposition of sputtered atoms reduces the effective sputtering efficiencies expected on the basis of the classical theory of ion-solid interaction.