کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9821652 1518988 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Extraction of the ion beam from hollow cathode ion source. Experiment and computer simulation
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Extraction of the ion beam from hollow cathode ion source. Experiment and computer simulation
چکیده انگلیسی
The experimental measurements and computer simulation results of the intensity of the Ar+ ion current emitted from the hollow cathode ion source as a function of extraction voltage are presented in the paper. The computer simulations of the phenomena inside the ion chamber and ion beam formation were done using modified version of the TRQR code based on particle-in-cell (PiC) method. The agreement between experiment and calculated results is quite good.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 78, Issues 2–4, 30 May 2005, Pages 649-654
نویسندگان
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