CCD-based vertex detector for GLC

As a charged particle tracking device, CCD pixel sensors are expected to have very high performance because of the excellent spatial resolution and the very thin material thickness of the sensitive layer. We have been executing R&D of a CCD vertex detector for Global Linear Collider (GLC) project. In this article we mainly present recent results of radiation damage tests of CCDs irradiated with low-energy β-rays and with a high-energy electron beam.