
Growth of ZrC thin films by aerosol-assisted MOCVD
Keywords: 31.15.Ew; 61.16.Bg; 61.16.Ch; 61.16.Ms; 81.05.Je; 81.15.GhA1. DFT calculation; A1. Phase equilibria; A3. Metalorganic chemical vapor deposition; B1. Zirconium carbide