Role of halogen in low-temperature growth of polycrystalline thin films by reactive thermal CVD
Keywords: 81.10.−h; 81.15.GhSilicon; Crystal growth; Thin film transistors
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Investigation of surface treatment effect of catalyst on the lifetime for Cat-CVD method
Keywords: 81.15.GhSilicon; Catalytic chemical vapor deposition
A simple quality factor for characterization of thin silicon films
Keywords: 68.55.−a; 73.63.−b; 81.15.GhSilicon; Solar cells; Chemical vapor deposition; Defects; Microcrystallinity
Hydrogenated amorphous and nanocrystalline silicon solar cells deposited by HWCVD and RF-PECVD on plastic substrates at 150 °C
Keywords: 73.61.Jc; 78.66.Jg; 84.60.Jt; 81.15.GhSilicon; Solar cells; Photovoltaics; Conductivity; Chemical vapor deposition; Photoconductivity
Deposition of phosphorus doped a-Si:H and μc-Si:H using a novel linear RF source
Keywords: 68.60.−p; 73.50.Pz; 78.30.−j; 81.15.GhSilicon; Chemical vapor deposition; Plasma deposition; Microcrystallinity; Absorption; Reflectivity; FTIR measurements
New insights in microcrystalline silicon deposition with expanding thermal plasma chemical vapor deposition
Keywords: 52.77.Dq; 61.43.Dq; 81.15.Aa; 81.15.GhSilicon; Microcrystallinity; Plasma deposition; Raman spectroscopy; FTIR measurements; Growth mechanism; Solar cells
Scaling properties of growing surfaces of microcrystalline silicon
Keywords: 05.45.Df; 68.37.Ps; 68.55.–a; 81.15.GhSilicon; Crystal growth; Chemical vapor deposition; Atomic force and scanning tunneling microscopy; Microstructure; Surfaces and interfaces
Characterization of the protocrystalline silicon multilayer
Keywords: 61.43.Dq; 68.37.Lp; 78.30.−j; 81.15.GhSilicon; Solar cells
Model for the amorphous roughening transition in amorphous semiconductor deposition
Keywords: 81.15.Aa; 68.55.Ac; 68.55.−a; 81.15.GhSilicon; Solar cells; Ellipsometry; Plasma deposition; Surfaces and interfaces
Detailed structural study of low temperature mixed-phase Si films by X-TEM and ambient conductive AFM
Keywords: 68.37.Ps; 68.55.Ac; 73.63.Bd; 81.15.GhSilicon; Solar cells; Plasma deposition; Atomic force and scanning tunneling microscopy; TEM/STEM
Line defects in epitaxial silicon films grown at 560∘C
Keywords: 61.72.Ff; 81.15.GhSilicon; Epitaxy; Defect etching