In-situ monitoring of the p- and n-type doping in AlGaInP
Keywords: 81.05.Ea; 81.15.Gh; 81.70.Fy; 61.72.Vv; A1. Doping; A1. Reflectance anisotropy spectroscopy; A3. Metalorganic vapor phase epitaxy; B1. AlGaInP; B2. Semiconducting quaternary alloys;