Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Keywords: Piezoelectric; Thin film; Acoustic wave; Biosensor; Microfluidics; Acoustofluidics; Lab-on-chip; ZnO; AlN; AC; alternating current; AE; acoustoelastic; AIDT; annular interdigitated transducer; ALD; atomic layer deposition; APM; acoustic-plate-mode; APTUDT