کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5464348 | 1517425 | 2017 | 167 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
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کلمات کلیدی
APMBa0.8Sr0.2TiO3BAWAcoustofluidicsAZOMicrofluidicsBDTBSTBCCBSA - BSACeA - CEAALD - آدرنولکودیستروفیLab-on-Chip - آزمایشگاه روی تراشهbovine serum albumin - آلبومین سرم گاوAln - آلنcarcinoembryonic antigen - آنتی ژن carcinoembryonicZnO - اکسید رویBiosensor - بیوسنسورAlternating current - جریان متناوبAtomic layer deposition - رسوب لایه اتمیThin film - لایه نازکBody centred cubic - مرکز مکعب بدنacoustic wave - موج آکوستیکBulk acoustic wave - موج بلند آکوستیکPiezoelectric - پیزوالکتریک
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications](/preview/png/5464348.png)
چکیده انگلیسی
Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN) have found a broad range of lab-on-chip applications such as biosensing, particle/cell concentrating, sorting/patterning, pumping, mixing, nebulisation and jetting. Integrated acoustic wave sensing/microfluidic devices have been fabricated by depositing these piezoelectric films onto a number of substrates such as silicon, ceramics, diamond, quartz, glass, and more recently also polymer, metallic foils and bendable glass/silicon for making flexible devices. Such thin film acoustic wave devices have great potential for implementing integrated, disposable, or bendable/flexible lab-on-a-chip devices into various sensing and actuating applications. This paper discusses the recent development in engineering high performance piezoelectric thin films, and highlights the critical issues such as film deposition, MEMS processing techniques, control of deposition/processing parametres, film texture, doping, dispersion effects, film stress, multilayer design, electrode materials/designs and substrate selections. Finally, advances in using thin film devices for lab-on-chip applications are summarised and future development trends are identified.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Progress in Materials Science - Volume 89, August 2017, Pages 31-91
Journal: Progress in Materials Science - Volume 89, August 2017, Pages 31-91
نویسندگان
Y.Q. Fu, J.K. Luo, N.T. Nguyen, A.J. Walton, A.J. Flewitt, X.T Zu, Y. Li, G. McHale, A. Matthews, E. Iborra, H. Du, W.I. Milne,