
The deposition and characterization of BCN films by cathodic arc plasma evaporation
Keywords: تعیین مشخصات; 77.84.B; 52.75.R; 81.15.G; 81.15; 68.55; 61.16.C; 79.60.D; 79.60; 61.16.BBoron carbon nitride; BCN s; Cathodic arc plasma; Thin films; Characterization; Microstructure