Effects of deposition method and conditions for IGZO film and thermal annealing on composite film quality, surface roughness, microstructural defects, and electrical properties of Ti/IGZO/graphene/polyimide specimens
Keywords: خواص الکتریکی و مکانیکی; Radio-frequency (RF) magnetron sputtering; E-beam evaporation; Indium gallium zinc oxide; Rapid thermal annealing (RTA); Electrical and mechanical properties;