
Keywords: 3c2e; 3-centre-2-electron bond; ALD; atomic layer deposition; BDEAS; bis(diethylamino)silane; CCP; capacitively-coupled plasma; CpMe; η5-monomethylcyclopentadienyl; Cp*; η5-pentamethylcyclopentadienyl; Cpx; a general substituted η5-cyclopentadienyl lig