Microstructural evolution and electrical resistivity of nanocrystalline W thin films grown by sputtering

Microstructural evolution and electrical resistivity of nanocrystalline W thin films grown by sputtering

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials Characterization - Volume 145, November 2018, Pages 473-478

Yong Jin Kim, Sung-Gyu Kang, Yeonju Oh, Gyu Won Kim, In Ho Cha, Heung Nam Han, Young Keun Kim,