کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10364726 871787 2015 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
More uniform Pd distribution in free-air balls of Pd-coated Cu bonding wire using movable flame-off electrode
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
More uniform Pd distribution in free-air balls of Pd-coated Cu bonding wire using movable flame-off electrode
چکیده انگلیسی
The currently high price of gold wire has led to the development of bonding wire made from palladium-coated-copper as a lower cost alternative. Increasing the uniformity of the Pd distribution in free-air balls, formed by melting the wire end with an electric spark, is of interest as it can influence the uniformity of process and reliability. To study this Pd distribution, free-air balls are made using four distinct electrical flame-off (spark) processes with short and long spark times from wire bonders with fixed and movable electrodes. Elemental analysis of the free-air ball surfaces reveal a higher Pd concentration on the movable electrode free-air balls than on the fixed electrode free-air balls. Elemental analysis of cross-sections show that the Pd distribution in free-air balls made with a fixed electrode has Pd trails flowing from the neck into the Cu ball center. Furthermore, micro- and nano-voids are observed to follow the Pd trails. In contrast, free-air balls made with a movable electrode exhibit less severe voiding and retain a uniform, thin Pd layer along the surface up to the tip of the free-air ball (shorter spark time). This can help to increase process consistency and reliability.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Reliability - Volume 55, Issue 1, January 2015, Pages 201-206
نویسندگان
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