Fabrication of 128×128 element optical switch array by micromachining technology

Polycrystalline VO2 thin films were obtained on Si substrates by ion beam sputtering deposition and annealing in flowing Ar gas. SEM images indicate that VO2 thin films were grown into compact surfaces. Four-probe measurements indicated that the VO2 thin films own good electrical homogeneity. After the films' production, micromachining technology including lithography, reaction ion etching and metallization connection processes was used to produce the optical switch array. As a result, the 128×128 element optical switch array was achieved.