Synchrotron X-ray microdiffraction analysis of proton irradiated polycrystalline diamond films

X-ray microdiffraction is a non-destructive technique that allows for depth-resolved, strain measurements with submicron spatial resolution. These capabilities make this technique promising for understanding the mechanical properties of MicroElectroMechancial Systems (MEMS). This investigation examined the local strain induced by irradiating a polycrystalline diamond thin film with a dose of 2 × 1017 H+/cm2 protons. Preliminary results indicate that a measurable strain, on the order of 10− 3, was introduced into the film near the End of Range (EOR) region of the protons.