کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10409647 894101 2005 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Flexible membrane pressure sensor
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Flexible membrane pressure sensor
چکیده انگلیسی
A new flexible low-pressure sensor design with convention architectures of n-type doped hydrogenated amorphous silicon with metal-on-amorphous silicon contacts on flexible substrate is fabricated. The sensing elements are wired according to a full Wheatstone-bridge layout, to reduce any temperature effects. These low-pressure sensors are subjected to repetitive strains/pressure testing. The experiment demonstrates a linear pressure relationship in the 0-2.0 psi range with a sensitivity of 1.953 ± 0.020 mV/psi. The measurements observed are in good agreement with the analytical solution.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 119, Issue 2, 13 April 2005, Pages 332-335
نویسندگان
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