Flexible thermoelectric generator for ambient assisted living wearable biometric sensors

▶ Present work shows design, fabrication and functional characterization of a very low cost energy autonomous, maintenance free, flexible and wearable micro thermoelectric generator (μTEG). ▶ The preliminary prototype integrates an array of 100 thin films thermocouples of Sb2Te3 and Bi2Te3. ▶ At real operation conditions (thermal gradient of 15 °C), device generates an open circuit output voltage of about 160 mV, electrical output power up to 4.18 nW. ▶ Deposition investigation of Sb2Te3 and Bi2Te3 thin films alloys on Kapton HN polyimide foil by RF magnetron co-sputtering technique is discussed. ▶ Deposition parameters have been optimized to gain perfect stoichiometric ratio and high thermoelectric power factor.