Chemical and microstructural modifications in LiPON thin films exposed to atmospheric humidity

► About effect of moisture on reduction in ionic conductivity of RF sputter deposited LiPON thin film. ► The reasons for reduction in ionic conductivity of LiPON thin films from 2.8×10-6 Scm-1 to 9.9×10-10 Scm-1 when exposed to air are analyzed. ► Exposure to humid ambience changes the surface morphology and elemental chemistry of LiPON.