Electrical and corrosion properties of the Ti5Si3 thin films coated on glass substrate by APCVD method

► Ti5Si3 thin film was coated on glass substrate by CVD for being used as a new bi-functional coating glass for energy saving with high properties of both visible and IR radiation control. ► The formation of the Ti5Si3 crystalline phases and the resistivity of the thin films were investigated. ► The electrochemical properties of the Ti5Si3 thin films in both acid and alkali solutions were discussed in detail to supply information for the thin films being used in hard environments.