Solid state field-assisted diffusion of silver in multi-component tellurite glasses

► Solid state field assisted diffusion of Ag in tellurite glasses was used to increase a refractive index of the doped layer. ► The increase of the refractive index in the Ag doped layer is on average 0.025. ► Refractive index profiles after SSFA diffusion were obtained combining the SIMS depth profiling and ellipsometry measurements. ►SSFA diffusion of Ag ions in tellurite glasses is a prospective method to fabricate planar waveguides.