Thermal evolution and optical properties of Cu nanoparticles in SiO2 by ion implantation

► Fcc Cu NPs have been formed in SiO2 and the thermal annealing can modify the SPR of Cu nanoparticles. ► The dominant chemical states of implanted Cu is metal Cu0, even after annealing up to 600 °C. ► The luminescence band of Cu-implanted SiO2 has been observed, and possible mechanism has been discussed.