Maskless pattern fabrication on Pyrex 7740 glass surface by using nano-scratch with HF wet etching

Line patterns were machined on borosilicate (Pyrex 7740 glass) surface using the combination of mechanical machining by Nanoindenter® XP and HF wet etching, and a etch-mask effect of the affected layer of the nano-scratched Pyrex 7740 glass surface was investigated.