Characterization of a nanocrystalline NiTiHf high temperature shape memory alloy thin film

A nanocrystalline Ni47.9Ti35.7Hf16.4 high temperature shape memory alloy thin film was fabricated by using DC magnetron sputtering deposition followed by rapid thermal annealing. Crystallization behavior, microstructure and martensitic transformation were studied. The dependence of Ms temperature on annealing temperature is discussed.