Hardness, hydrophobic and optical properties of fluorine and boron co-alloyed diamond-like carbon films

Fluorine (F) and boron (B) co-alloyed diamond-like carbon (FB-DLC) films were prepared on polymethyl methacrylate (PMMA), polycarbonate, glass, and silicon 〈100〉 wafer using a B2H6+C2H2+C2F6 plasma immersion ion processing (PIIP) technique. The chemical composition and atomic bonding of FB-DLC films were analyzed to investigate their influence on the hardness, optical band gap and contact angles of water. Compared to B-alloyed or F-alloyed DLC films, BF-alloyed DLC films exhibited enhanced hardness, high optical gap energy, and improved hydrophobic properties.