Combinatorial approach to the growth of α-(Al1 − x,Crx)2 + δ(O1 − y,Ny)3 solid solution strengthened thin films by reactive r.f. magnetron sputtering

► Al-Cr-O-N thin films in corundum α-(Al1−x,Crx)2+δ(O1−y,Ny)3 solid solution structure. ► Magnetron sputtering from a segmented Al-Cr target in Ar-O2-N2 atmosphere. ► Combinatorial approach to thin film development. ► Systematic variation of Al:Cr concentration ratio and N2/(N2+O2) gas flow ratio.