Influence of inert gas species on the growth of silver and molybdenum films via a magnetron discharge

► Increased mass of sputtering gas gives more varied crystalline texture for silver. ► Heavy sputter gas improves electrical conductivity and reflectance of silver films. ► Lighter sputtering gases give harder and smoother silver coatings. ► Gas inclusion in the film is greater for lighter sputtering gases. ► Molybdenum films have increased grain size when sputtered with heavier gas species.