Preparation of a BiFeO3/LaNiO3 multiferroic oxide superlattice structure by RF magnetron sputtering

► High quality of BiFeO3/LaNiO3 (BFO/LNO) superlattice structure was fabricated with rf sputtering. ► Increased crystalline quality when increasing the deposition temperature to 660 °C. ► The largest remanent polarization (Pr) occurs at deposition temperature 660 °C. ► The structure degraded gradually due to the formation of the NiO phase at ≧ 710 °C, and was severely destroyed at 810 °C. ► The ferroelectric properties are highly correlated with the lattice strain and interface quality.