Modeling reactive sputter deposition of titanium nitride in a triode magnetron sputtering system

►The Berg's model was successfully modified and applied to a triode magnetron sputtering system. ►The results show that decreasing the grid-to-target distance reduces the hysteresis loop in reactive deposition of TiN. ►The reduced hysteresis in TMS is due to the deposition of material on the grid, reducing the role of the collecting area.