Thermal conductivity of high-temperature Si-B-C-N thin films

► Thin films of two different Si-B-C-N chemical compositions have been annealed at various temperatures. ► The samples have been characterized by TDTR, XRD, and SEM. ► Si30-32B10-12C2-4N49-51 thin films remain amorphous at 1400 °C with low thermal conductivity. ► Si39-41B9-11C2-4N43-45 thin films crystallize at 1400 °C with increased thermal conductivity.