Study on nanocrystalline Cr2O3 films deposited by arc ion plating: II. Mechanical and tribological properties

► We studied the influence of substrate bias voltage on mechanical and tribological properties of AIP Cr2O3 films. ► Wear failure mechanism of AIP Cr2O3 films in dry sliding contact was also explored. ► Microhardness, adhesion, friction coefficient, and wear rate of Cr2O3 films were greatly altered by substrate bias voltage. ► By comparison, the Cr2O3 film possessed the best mechanical and tribological performance as the bias voltage is − 100 V.