Discharge physics of high power impulse magnetron sputtering

► Overview with review and tutorial character. ► High power impulse magnetron sputtering is defined and distinguished from other forms of sputtering. ► Roles of self-sputtering and rarefaction are emphasized. ► Self-sputtering may (or may not) run away. ► HIPIMS physics is illustrated using niobium target. ► HIPIMS offers new opportunities for selected coatings applications.