Effect of the deposition process on the composition and structure of sputtered lanthanum cuprate films

► La-Cu-O films were deposited using either co-sputtering or sputtering. ► Crystalline lanthanum cuprate phase was formed after an annealing in air at 500 °C. ► The composition of co-sputtered films was hardly reproducible. ► Irreversible evolution of the composite target composition was noticed.